Ж36641:SD/2001/665 | Uppsala University. Acta Universitatis Upsaliensis, Comprehensive summaries of Uppsala dissertations from the Faculty of science and technology [Text] / Uppsala University. - Uppsala. - ISSN 1104-232X. 2001, №665 : CVD and ALD of group IV- and V-oxides for dielectric applications / K. Forsgren. - Uppsala : [б.в.], 2001. - 55 p.: ill. (Acta Universitatis Upsaliensis Comprehensive summaries of Uppsala dissertations from the Faculty of science and technology, ISSN 1104-232X ; 2001, №665). - Bibliogr.: p.49-55.
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