Ж36641:SD/2000/520 | Uppsala University. Acta Universitatis Upsaliensis, Comprehensive summaries of Uppsala dissertations from the Faculty of science and technology [Text] / Uppsala University. - Uppsala. - ISSN 1104-232X. 2000, №520 : High-rate reactive magnetron sputter deposition and characterization of metal oxide films / M. K. Olsson. - Uppsala : [б.в.], 2000. - 79 p.: fig. (Acta Universitatis Upsaliensis Comprehensive summaries of Uppsala dissertations from the Faculty of science and technology, ISSN 1104-232X ; 2000, №520). - Bibliogr.: P.72-78.
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