By small angle X-ray scattering (SAXS) and atomic force microscopy characteristic sizes are determined, structural features of thin iron films deposited by magnetron evaporation onto substrates from pyroceramics are established. It is shown that morphologically the film is characterized by disorder. It is formed from columnar nano crystallites that are oriented either perpendicular to the substrate or situated in its plane, which dictates polydispersity of those coatings. It is shown that SAXS may be thought of as nondestructive technique for analyzing structure and composition and conducting quality control of magnetron films.

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