The article describes the methodology and results of hierarchical modeling of the induction evaporator with electromagnetic field concentration, which takes into account the related heterogeneous processes and allows to numerically calculate the electromagnetic field in the vicinity of the evaporator as well as current and temperature distributions in the loaded crucible. The model development work allows to make the conclusion that the method of finite elements is most suitable for calculation of electromagnetic and temperature fields. The given model may be employed for modeling vapor flow ejection from the crucible to substrates and electrical discharges in the evaporator.

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