Kaipoldayev O. E. Titanium carbide obtained by magnetron sputtering of graphite on heated titanium substrate / O. E. Kaipoldayev, A. D. Muradov, Y. S. Mukhametkarimov, R. R. Nemkayeva, G. A. Baigarinova, M. B. Aitzhanov, N. R. Guseinov // Журн. нано- та електрон. фізики. - 2017. - 9, № 5. - С. 05045-1-05045-3. - Бібліогр.: 12 назв. - англ.Titanium carbide was synthetized by sputtering graphite target on heated titanium substrate by magnetron sputtering process. The obtained samples were characterized by X-ray diffraction (XRD) analysis and Raman spectroscopy, the elemental analysis was made by Energy-dispersive X-ray spectroscopy (EDX). Titanium carbide (TiC) structure was obtained by deposition of sputtered carbon atoms and clusters to the resistively heated titanium substrate surface with temperatures 700, 800, 900 and <$E1000~symbol Р roman C>. The XRD analysis showed that the formation of TiC structure is take place when the substrate is heated to <$E1000~symbol Р roman C>. The Raman spectroscopy showed that when the incident power of laser is 100 % (35 mW) the structure is unstable in samples with the substrate temperatures 700, 800 and <$E900~symbol Р roman C> and the most stable titanium carbide structure is created when the substrate temperature is <$E1000~symbol Р roman C>. Індекс рубрикатора НБУВ: Г124.415 + В372.5
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Шифр НБУВ: Ж100357 Пошук видання у каталогах НБУВ
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